Josephson Junction using molecular beam epitaxy

ABSTRACT

According to various implementations of the invention, a vertical Josephson Junction device may be realized using molecular beam epitaxy (MBE) growth of YBCO and PBCO epitaxial layers in an a-axis crystal orientation. Various implementations of the invention provide improved vertical JJ devices using SiC or LSGO substrates; GaN, AlN, or MgO buffer layers; YBCO or LSGO template layers; YBCO conductive layers and various combinations of barrier layers that include PBCO, NBCO, and DBCO. Such JJ devices are simple to fabricate with wet and dry etching, and allow for superior current flow across the barrier layers.

CROSS-REFERENCE TO RELATED APPLICATIONS

This Application is a continuation application of U.S. application Ser.No. 15,644,753, entitled “Improved Semiconductor Device using MolecularBeam Epitaxy,” which was filed Jul. 8, 2017, now granted as U.S. Pat.No. 10,431,729; which in turn claims priority to U.S. Provisional PatentApplication No. 62/360,920, entitled “Improved Semiconductor Deviceusing Molecular Beam Epitaxy,” which was filed on Jul. 11, 2016. Each ofthe foregoing applications is incorporated herein by reference in itsentirety.

FIELD OF THE INVENTION

The invention is generally related to high temperature superconductors,and more specifically, to techniques for manufacturing improvedYBCO-based vertical Josephson Junctions (JJs) using molecular beamepitaxy (MBE).

BACKGROUND OF THE INVENTION

There are many conventional techniques to produce YBCO materials, themost common of which is pulsed laser deposition. This technique has beenthe leading commercial technique to grow YBCO films in a c-axiscrystalline orientation. These YBCO films have successfully producedc-axis Josephson Junctions (JJs) that have been utilized to producesuperconducting wires, sensors, and other applications.

Improved techniques for producing YBCO materials, including JJs, areneeded.

SUMMARY OF THE INVENTION

According to various implementations of the invention, a-axis thin filmYBCO layers may be deposited using a technique called molecular beamepitaxy (MBE). MBE is a well-characterized crystal growth technique forimproved thin films in the semiconductor domain. According to variousimplementations of the invention, MBE may be used to grow very highquality YBCO (and related) thin films in an a-axis crystal orientation.Various implementations of the invention provide higher crystallinequality, higher accuracy in film thickness, higher a-axis orientation,as well as single crystal growth with lattice matching or strainedlattice matching with YBCO-related thin film materials.

Various implementations of the invention utilize various perovskitematerials including, but not limited to, YBa₂Cu₃O_(7-x),PrBa₂Cu₃O_(7-x), DyBa₂Cu₃O_(7-x), NdBa₂Cu₃O_(7-x), and otherperovskites. Such materials are commonly and collectively expressed asXBa₂Cu₃O_(7-x) (XBCO) where X can be elements such as Y, Pr, Dy, Ndetc., as would be appreciated. For purposes of this description, thesematerials are more commonly referred to as simply YBCO, PBCO, DBCO,NBCO, etc., as would be appreciated.

According to various implementations of the invention, the substrate maybe placed inside an MBE reactor and exposed to various metallic sourcesat temperature. A-axis films may be grown onto the substrate using aRHEED measuring tool to monitor and maintain good crystallographicquality. Thickness sensors may be used to accurately measure the height(e.g., thickness) of the a-axis films, and temperature sensors may beused to make sure the a-axis crystal is grown with correctspecifications, and robustness for repeatability.

In various implementations of the invention, various buffer layers maybe grown to allow the YBCO and/or related thin films to be latticematched and grown with high quality onto the substrates. In someimplementations, buffer layers of aluminum nitride (AlN) and/or galliumnitride (GaN) may be used to grow onto SiC substrates to allow thegrowth of LSGO to become a base layer for JJ device epitaxial growth(alternating and various composition of layers of YBCO and PBCO).

According to various implementations of the invention, once all of thethin film layers are deposited using the MBE reactor, the wafer may beremoved and JJ devices may be subsequently fabricated using a clean roomfacility with standard tooling (dry etch, wet etch, photolithography,metallization, etc.) as would be appreciated.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a conventional c-axis orientation epitaxial structureof a Josephson Junction.

FIG. 2 illustrates an a-axis orientation epitaxial structure of aJosephson Junction according to various implementations of theinvention.

FIG. 3 illustrates an epitaxial layer that may be grown using MBEaccording to various implementations of the invention, namely, a bufferlayer onto a substrate.

FIG. 4 illustrates an epitaxial layer that may be grown by MBE accordingto various implementations of the invention, namely a template layeronto the buffer layer.

FIG. 5 illustrates epitaxial layers that may be grown by MBE a-axisorientation according to various implementations of the invention,namely layers of YBCO and PBCO that form a JJ device onto the templatelayer.

FIG. 6 illustrates epitaxial layers that may be grown by MBE a-axisorientation according to various implementations of the invention,namely multiple alternating superlattice layers of YBCO and PBCO thatform a JJ device onto the template layer.

FIG. 7 illustrates an epitaxial layer that may be grown using MBEaccording to various implementations of the invention, namely, a bufferlayer onto a substrate.

FIG. 8 illustrates epitaxial layers that may be grown by MBE a-axisorientation according to various implementations of the invention,namely layers of YBCO and PBCO that form a JJ device onto a YBCOtemplate layer that in turn was grown on top of the buffer layer.

FIG. 9 illustrates a Josephson Junction device with electrical terminalscoupled to the conductive layers according to various implementations ofthe invention.

DETAILED DESCRIPTION

Various implementations of the invention utilize YBCO and related filmsgrown in an a-axis crystal orientation. While a-axis orientation growthof YBCO has been demonstrated previously, a-axis YBCO films have notbeen used to commercially develop a vertical Josephson Junction (JJ) asa result of high cost, low quality, poor crystal growth, poor filmthickness, poor composition, and difficult control typically associatedwith growth of such a-axis YBCO films.

Furthermore, pulsed laser deposition thin films of YBCO have experiencedvarious manufacturing issues, such as the material being brittle andprone to excessive degradation even in the c-axis orientation, whichalso has experienced limited commercial success. These conditions aresignificantly worse for a-axis crystal orientations of YBCO films. As aresult, pulsed laser deposition as a technique to deposit thin film YBCOmaterials has suffered significant set-backs.

In spite of these disadvantages, YBCO has great potential to industriesthat rely on magnetic fields (shields, magnets, high current products,bearings, etc.) with a vertical JJ device structure. For example, alonger coherence length in a-axis YBCO as well as a higher currentdensity makes a-axis YBCO desirable over c-axis YBCO for vertical JJdevices. Various implementations of the invention provide a costeffective process to grow thin film YBCO a-axis orientation materialsthat are not only low cost, and high quality, but also can performbetter than conventional c-axis YBCO materials.

According to various implementations of the invention, vertical JJdevices may be realized using a-axis thin film deposition of YBCO andPBCO layers. These YBCO and PBCO layers are deposited using a techniquecalled molecular beam epitaxy (MBE). MBE is a well characterized crystalgrowth technique for improved thin films in the semiconductor domain.Various implementations of the invention use MBE to grow very highquality YBCO thin films (and related films such as PBCO, DBCO, NBCO,etc.) in an a-axis crystal orientation.

Materials such as PBCO are considered barrier layers as they typicallyseparate the YBCO layers in a vertical JJ device structure. MBE allowsfor higher crystalline quality, higher accuracy in film thickness,higher a-axis orientation, as well as single crystal growth with latticematching or strained lattice matching with YBCO-related thin filmmaterials. MBE also allows the a-axis films to circumvent the oxygendisorder that has typically prevented previous attempts to grow suchfilms using pulse laser deposition from being successful.

According to various implementations of the invention, these MBE-growna-axis films may be grown onto various types of substrates: 1) the firstbeing SrLaGaO₃ [100] (commonly referred to as LSGO); 2) the second beingstrontium titanate (STO); and 3) the third being silicon carbide (SiC)substrates. There are a number of other substrates that may be utilizedto support MBE-grown a-axis films, including, but not limited to:Silicon (Si), Sapphire (Al₂O₃), and Magnesium Oxide (MgO). While LSGOmay not be available in large format wafer sizes, SiC, Si, Sapphire, MgOand STO all are available in larger format wafer sizes of 50 mm or more.In some implementations of the invention, the substrates are at least100 mm in size, or in some implementations, 150 mm, so that thecompleted a-axis films that are grown onto the substrates may befabricated in a standard semiconductor fabrication facility.

In some implementations of the invention, the substrates may be grown inthe [100] crystal orientation; in some implementations of the invention,the substrates may be grown in the [111] crystal orientation, the [110]crystal orientation, or other orientations as would be appreciated.

In some implementations of the invention, the substrate is placed insidean MBE reactor and exposed to various metallic sources at temperature.In some implementations of the invention, a-axis films may be grown ontothe substrate using a RHEED measuring tool to monitor and maintain goodcrystallographic quality. In some implementations of the invention,thickness sensors may be used to accurately measure a height (i.e.,thickness) of the a-axis films. In some implementations of theinvention, temperature sensors may be used to make sure the a-axiscrystal is grown with correct specifications, and robustness forrepeatability.

Various buffer layers may be grown to allow the YBCO and related thinfilms to be lattice matched and grown with high quality onto thesubstrates. In some implementations of the invention, buffer layers ofaluminum nitride (AlN) and/or gallium nitride (GaN) may be used to growonto SiC substrates to allow the growth of LSGO to become a base layerfor JJ device epitaxial growth (alternating and various composition oflayers of YBCO and PBCO).

Once all of the thin film layers are deposited using the MBE reactor,the wafer is removed, and JJ devices may be fabricated using a cleanroom facility with standard tooling (dry etch, wet etch,photolithography, metallization, etc.) as would be appreciated.

Vertical JJ structures using a-axis crystal orientation may be realizedusing a number of different barrier layers that may be placed in betweenconductive YBCO layers. According to various implementations of theinvention, PCBO, NBCO, and DBCO may each function as a barrier layer. Insome implementations of the invention, more than one barrier layer maybe used in between conductive YBCO layers. In some implementations ofthe invention, a transition from conductive YBCO layer to barrier layermay be a complex layer structure comprising a number of thinnerinterface layers, each comprising one or more of the barrier layermaterials.

FIG. 1 illustrates a conventional c-axis orientation epitaxial structure100 of a vertical JJ device. In this orientation, current flow, I_(JJ),between conductive layers 120 and across a barrier layer 110 is poor inthe vertical direction. Furthermore, as PLD is used as the growthtechnique for these devices, the height (i.e., thickness) of the variouslayers 110, 120 is extremely inaccurate. This is illustrated in FIG. 1by the differing thicknesses of layers 110, 120. As a result, suchconventional processes are not sufficiently accurate to design anddevelop commercial JJ devices, particularly with barrier layers 110having thicknesses on the order of tens of nanometers.

As would be appreciated, typical current flow in the c-axis films iscontrary to the operation of the vertical JJ device, which requirescurrent flow across barrier layer 110. As a result, such devicesdemonstrate poor performance irrespective of the thickness and qualityof conductive layers 120 or barrier layer 110.

FIG. 2 illustrates an a-axis orientation epitaxial structure 200 of avertical JJ device according to various implementations of theinvention. Various implementations of the invention provide superiorcurrent flow between conductive layers 220 and across a barrier layer210. Also, due to the growth of structure 200 using MBE, thicknesses ofthe respective layers 210, 220 are more tightly controlled resulting inhigher performance operation. In some implementations of the invention,a thickness of the respective films are typically 100 nanometers;however, the thicknesses may range from 10 nanometers to over 1000nanometers. In some implementations of the invention, a quality of thefilms is single crystal (as may be tested/determined by x-raydiffraction); in some implementations of the invention, the quality ofthe films is nearly single crystal. Vertical JJ devices may be readilyfabricated using standard fabrication plants in the semiconductorbusiness as would be appreciated.

FIG. 3 illustrates an epitaxial layer 300 that may be grown using MBEaccording to various implementations of the invention, namely, a bufferlayer 320 onto a substrate 310. As illustrated in FIG. 3, substrate 310may be SiC according to various implementations of the invention. Oneadvantage of using SiC for substrate 310 is that the material isavailable in large format wafers, which makes the fabrication of thewafer simpler and more cost effective.

As also illustrated in FIG. 3, buffer layer 320 may be AlN, MgO, or GaNaccording to various implementations of the invention. As would beappreciated, in some implementations of the invention, buffer layer 320may be any other material that can be epitaxially lattice matched toSiC. In some implementations of the invention, an interface 315 betweensubstrate layer 310 and buffer layer 320 may be clean and abrupt. Insome implementations of the invention, interface 315 may be gradedbetween buffer layer 320 and substrate layer 310 as would beappreciated. For example, there might be interface layers that wouldinclude compounds of both substrate layer 310 as well as buffer layer320. In some implementations of the invention, a thickness of bufferlayer 320 may well approach a few 100 nanometers. In someimplementations of the invention, a thickness of buffer layer 320 mayreach a few 1000 nanometers. Buffer layer 320 may also be a combinationof epitaxial layers of related compounds. Examples would be AlNinterspaced with layers of AlGaN, InGaN, or InAlGaN.

FIG. 4 illustrates an epitaxial layer 400 that may be grown by MBEaccording to various implementations of the invention, namely a templatelayer 430 onto buffer layer 320. As illustrated in FIG. 4, templatelayer 430 may be LSGO that is grown by MBE onto a AlN buffer layer 320.In this case, the LSGO acts as a template that sets up the correctcrystal orientation for a-axis YBCO. In some implementations of theinvention, a thickness of template layer 430 may be 10s of nanometers.Template layer 430 may be grown onto various buffer layer materials thatinclude GaN, AlN, MgO or other materials as would be appreciated. Thecrystal lattice between template layer 430 and buffer layer 320 may besingle crystal, strained single crystal, polycrystalline, and evenrelaxed. The purpose of template layer 430 is to be able to set thecrystal orientation of the vertical JJ to be a-axis.

FIG. 5 illustrates epitaxial layers 500 that may be grown by MBE a-axisorientation according to various implementations of the invention,namely conductive layers 540 and barrier layer 550 that form a JJ device510 on template layer 430. FIG. 5 illustrates a simple PBCO barrierlayer 550 sandwiched between two conductive YBCO layers 540.

In some implementations of the invention, a thickness of barrier layer550 is between 1 and 1000 nanometers. In some implementations of theinvention, a thickness of barrier layer 550 is on the order of 10s ofnanometers (i.e., 10 nm to 100 nm). In some implementations of theinvention, a thickness of conductive layer 550 is between 1 and 1000nanometers. In some implementations of the invention, a thickness ofbarrier layer 550 is on the order of 10s of nanometers (i.e., 10 nm to100 nm). In some implementations of the invention, barrier layer 550 isthicker that conductive layer 540. In some implementations of theinvention, conductive layer 540 is thicker that barrier layer 550. Insome implementations of the invention, each conductive layer 540 has thesame thickness. In some implementations of the invention, eachconductive layer 540 has a different thickness.

As illustrated in FIG. 6, other superlattice formations of YBCO and PBCOmay also be grown where a number of conductive layers 540 and barrierlayers 550 may increase depending on a design of a vertical JJ device610. (In FIG. 6, a buffer layer and a substrate layer are notillustrated for purposes of convenience.) In some implementations of theinvention, the thickness may be 100s of nanometers.

In some implementations as illustrated in FIG. 6, more than one barrierlayer 550 may be used in between conductive YBCO layers 540 similar tobarrier layers that are used in multi-quantum wells. In this case,barrier layers are inter-spaced between, above and below conductivelayer 540 in a superlattice format. In some implementations of theinvention, a transition from conductive YBCO layer 540 to barrier layer550 may be part of a more complex layer structure where a number ofthinner interface layers comprise one or more of the barrier layermaterials. These interface layers act as a simple transition fromconductive layer 540 to barrier layer 550 (and back) through changing ofmaterial composition. Interface layers may be grown by simply turningoff one metal, and turning on another metal. The transition layer mayalso be composed of a number of layers that not only allow materialcomposition change but doping, temperature, charge distribution,strained lattice effects, stressed lattice effects, lattice mismatcheffects, and bandgap engineering as part of the overall interface designbetween conductive and insulative layers.

FIG. 7 illustrates an epitaxial layer 700 that may be grown using MBEaccording to various implementations of the invention, namely, a bufferlayer 720 onto a substrate 710. As illustrated in FIG. 7, substrate 710may be an LSGO substrate in various implementations of the invention. Asalso illustrated in FIG. 7, buffer layer 720 may be a YBCO or MgO bufferlayer. In these implementations, conductive YBCO layers and barrier PBCOlayers (collectively, not otherwise illustrated in FIG. 7) that form thevertical JJ device may be grown on top of buffer layer 720. Oneimportant difference here is that LSGO substrates 710 do not come inlarge format wafers, and thus may limit commercial development.Nonetheless, use of LSGO substrates 710 may be desirable as they providea vehicle for high quality a-axis YBCO films using MBE.

FIG. 8 illustrates epitaxial layers 800 that may be grown by MBE a-axisorientation according to various implementations of the invention,namely conductive layers 840 of YBCO and a barrier layer 850 of PBCOthat form a JJ device 810 onto a YBCO template layer 830 that in turnwas grown on top of buffer layer 720. In some implementations of theinvention, vertical JJ device 810 may be formed on an LSGO substrate 710with buffer layers 720 of YBCO or MgO, and template layer 830 of YBCO.In these implementations, YBCO template layer 830 promotes a-axis growthof vertical conductive YBCO layer 840 and barrier PBCO layers 850 forvertical JJ device 810.

FIG. 9 illustrates a JJ device 910 with electrical terminals 920 coupledto conductive layers 940 according to various implementations of theinvention. As illustrated in FIG. 9, YBCO a-axis conductive layers 840are grown on top of YBCO template layer 830. In some implementations ofthe invention, vertical JJ device 910 may be either dry or wet etched tocreate a mesa structure. Etching removes some of the top two layers toexpose the lower conductive YBCO layer. Electrical contacts 920 may bemade using ohmic metallization from e-beam evaporators that use silveror gold. Wire bonding of conductors 930 to electrical contacts 920 allowelectrical stimulus to reach vertical JJ device 910 and on operationconduction occurs between two conductive layers 840 and across barrierregion 850 (i.e., barrier layer).

While the invention has been described herein as using YBCO for theconductive layer(s), other perovskites may be used as would beappreciated.

What is claimed:
 1. A Josephson Junction comprising: a template layer ofLGSO configured to orient subsequent adjacent layers in an a-axisorientation; a first conductive layer adjacent the template layer andoriented in the a-axis orientation, wherein the first conductive layeris a superconducting perovskite; a barrier layer of PBCO, NBCO, or DBCOadjacent the first conductive layer and oriented in the a-axisorientation; and a second conductive layer adjacent the barrier layerand oriented in the a-axis orientation, wherein the second conductivelayer is a superconducting perovskite; wherein the template layer, thefirst conductive layer, the second conductive layer and the barrierlayer are all formed via molecular beam epitaxy.
 2. The JosephsonJunction of claim 1, further comprising: a buffer layer adjacent to andconfigured to support the template layer.
 3. The Josephson Junction ofclaim 2, further comprising: a substrate layer adjacent to andconfigured to support the buffer layer.
 4. The Josephson Junction ofclaim 3, wherein the substrate layer comprises SiC.
 5. The JosephsonJunction of claim 2, wherein the buffer layer comprises AlN, MgO, orGaN.
 6. The Josephson Junction of claim 2, wherein the buffer layercomprises YBCO in the a-axis orientation or MgO.
 7. The JosephsonJunction of claim 1, wherein one of the conductive layers comprisesYBCO.
 8. The Josephson Junction of claim 7, wherein both of theconductive layers comprise YBCO.
 9. The Josephson Junction of claim 7,wherein the other one of the conductive layers comprises asuperconducting perovskite other than YBCO.
 10. A Josephson Junctioncomprising: a template layer of LGSO configured to orient subsequentadjacent layers in an a-axis orientation; a first conductive layer ofYBCO adjacent the template layer and oriented in the a-axis orientation;a barrier layer of PBCO adjacent the first conductive layer and orientedin the a-axis orientation; and a second conductive layer of YBCOadjacent the barrier layer and oriented in the a-axis orientation;wherein the template layer, the first conductive layer, the secondconductive layer and the barrier layer are all formed via molecular beamepitaxy.